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  • Design of a Gyroscope sensor using MEMS technology
Project TitleDesign of a Gyroscope sensor using MEMS technology
Project PIProf.Dr Amal Zaki
Project Abstract

This project discusses the design issues of the MEMS gyroscope and its applications in different industries like automotive, consumer electronics devices, entertainments, gaming control and satellites. MEMS gyroscopes are making significant progress towards high performance and low power consumption. They are mass produced at low cost with small form factor to suit the consumer electronics market. MEMS gyroscopes use the Coriolis Effect to measure the angular rate.  The objective of this project is the design of a vibratory MEMS gyroscope using the tuning fork configuration to sense the angular acceleration and convert it into capacitance detection. Almost all reported micromachined gyroscopes use vibrating mechanical elements (proof-mass) to sense rotation. They have no rotating parts that require bearings, and hence they can be easily miniaturized and batch fabricated using micromachining techniques. All vibratory gyroscopes are based on the transfer of energy between two vibration modes of a structure caused by Coriolis acceleration. Coriolis acceleration, named after the French scientist and engineer G. G. de Coriolis (1792–1843), is an apparent acceleration that arises in a rotating reference frame and is proportional to the rate of rotation. The main project goal is leveraging ME department Engineers experience in the field of MEMS technology. We are planning to prepare a well skilled staff in this field for our new MEMS facility that will be established at ERI new location. Establishing such facilities requires man power, design center, testing labs. We are focusing in acquiring some of these facilities from project funds, while the others can be obtained from other funds of ERI. We will need some of facilities like measuring equipments, software packages, fabrication cost (Highly expensive about $5000 for 1st run from europractice foundry) if available.

Project Objectives

1- Gyroscope sensor design
2- Simulation of the sensor to know its properties and judge its performance
3- Possibility to manufacture it if the resources are available

Project Deliverables

-

Project Beneficaries

-

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